JPS645033U - - Google Patents

Info

Publication number
JPS645033U
JPS645033U JP9966187U JP9966187U JPS645033U JP S645033 U JPS645033 U JP S645033U JP 9966187 U JP9966187 U JP 9966187U JP 9966187 U JP9966187 U JP 9966187U JP S645033 U JPS645033 U JP S645033U
Authority
JP
Japan
Prior art keywords
clean room
air
air conditioner
bypass pipe
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9966187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354340Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9966187U priority Critical patent/JPH0354340Y2/ja
Publication of JPS645033U publication Critical patent/JPS645033U/ja
Application granted granted Critical
Publication of JPH0354340Y2 publication Critical patent/JPH0354340Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP9966187U 1987-06-29 1987-06-29 Expired JPH0354340Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9966187U JPH0354340Y2 (en]) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9966187U JPH0354340Y2 (en]) 1987-06-29 1987-06-29

Publications (2)

Publication Number Publication Date
JPS645033U true JPS645033U (en]) 1989-01-12
JPH0354340Y2 JPH0354340Y2 (en]) 1991-11-29

Family

ID=31327028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9966187U Expired JPH0354340Y2 (en]) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPH0354340Y2 (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498024A (ja) * 1990-08-16 1992-03-30 Takenaka Komuten Co Ltd 空調装置
WO2007043658A1 (ja) * 2005-10-13 2007-04-19 Daikin Industries, Ltd. 滅菌システム
WO2007043655A1 (ja) * 2005-10-13 2007-04-19 Daikin Industries, Ltd. 滅菌装置
WO2018225298A1 (ja) * 2017-06-06 2018-12-13 株式会社日立産機システム ファンフィルタユニット、無菌装置およびクリーンルーム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4529259B2 (ja) * 2000-09-04 2010-08-25 澁谷工業株式会社 アイソレータ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498024A (ja) * 1990-08-16 1992-03-30 Takenaka Komuten Co Ltd 空調装置
WO2007043658A1 (ja) * 2005-10-13 2007-04-19 Daikin Industries, Ltd. 滅菌システム
WO2007043655A1 (ja) * 2005-10-13 2007-04-19 Daikin Industries, Ltd. 滅菌装置
JP2007130404A (ja) * 2005-10-13 2007-05-31 Daikin Ind Ltd 滅菌システム
WO2018225298A1 (ja) * 2017-06-06 2018-12-13 株式会社日立産機システム ファンフィルタユニット、無菌装置およびクリーンルーム
JP2018204881A (ja) * 2017-06-06 2018-12-27 株式会社日立産機システム ファンフィルタユニット、無菌装置およびクリーンルーム
US11112143B2 (en) 2017-06-06 2021-09-07 Hitachi Industrial Equipment Systems Co., Ltd. Fan filter unit, sterilization apparatus and clean room

Also Published As

Publication number Publication date
JPH0354340Y2 (en]) 1991-11-29

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